Wafer Fabrication Equipment

  1. NIKON S208D, 300mm, s/n: 8732034

    Wafer Steppers: Deep UV

    NIKON S208D, 300mm, s/n: 8732034

    KrF process

    Tool ID: LKSC759

  2. NIKON, NSR-S208D, 300mm, s/n: 8732039.

    Wafer Steppers: Deep UV

    NIKON, NSR-S208D, 300mm, s/n: 8732039.

    NIKON Main Body

    Tool ID: LKSC760

  3. AMAT Endura II, 300mm, s/n: B01859

    Other Plasma Processing Equipment and Tools

    AMAT Endura II, 300mm, s/n: B01859

    AMAT Endura II Metal Deposition Platform Copper Barrier Seed System

    Tool ID: MDX28502

  4. TEL Tactras Vigus, 300mm, s/n: FA1272

    Other Chemical Vapor Deposition Equipment

    TEL Tactras Vigus, 300mm, s/n: FA1272

    With Vigus Ix BSP Chambers

    Tool ID: ETX28512

  5. Novellus SCON, 200mm, s/n: 97-47-5431

    Other Chemical Vapor Deposition Equipment

    Novellus SCON, 200mm, s/n: 97-47-5431

    Tungsten CVD

    Tool ID: WCVD-A03

  6. TEL ACT8, 200mm, s/n:9201664

    Manual Photoresist Coaters

    TEL ACT8, 200mm, s/n:9201664

    4COT/4DEV

    Tool ID: TCDVD-12

  7. ASML PAS5500/750, 200mm, s/n:8723

    Other Plasma Processing Equipment and Tools

    ASML PAS5500/750, 200mm, s/n:8723

    DUV Scanner

    Tool ID: ASCND-12

  8. AMAT Centura 5200, 200mm, s/n:CB33

    Other Plasma Processing Equipment and Tools

    AMAT Centura 5200, 200mm, s/n:CB33

    Hard mask

    Tool ID: HDMD-502

  9. DNS SU-3100, 300mm, s/n: 530L00640A

    Other Wet Process Equipment

    DNS SU-3100, 300mm, s/n: 530L00640A

    Single Wafer Cleans

    Tool ID: SNK2451

  10. Nikon NSR-2205I14E / N4E-A, 200mm, s/n: N4E0901

    Wafer Steppers: I-Line

    Nikon NSR-2205I14E / N4E-A, 200mm, s/n: N4E0901

    NIKON I-LINE STEPPER

    Tool ID: STEP-504

  11. Novellus C2-SCON, 200mm, s/n: 00-11-C25866

    Other Chemical Vapor Deposition Equipment

    Novellus C2-SCON, 200mm, s/n: 00-11-C25866

    Novellus Concept 2 Sequel

    Tool ID: CAPO-A05

  12. TEL ACT8, 200mm, s/n: 9201134

    Manual Photoresist Coaters

    TEL ACT8, 200mm, s/n: 9201134

    2COT/4DEV

    Tool ID: TCDEV-33