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Your search for Manufacturer: ASM
found:
  • 11 individual listing(s) with a matching description:
 Offered (box) or Wanted (coins)  Item ID  Short Description Product Type / Details # Price Notes Location
Make Model
  $  
195174

ASM  

E3200  

List all items of this typeChemical Vapor Deposition Equipment - Other

in Chemical Vapor Deposition Equipment

1 Inquire Dresden, Saxony, Germany
ASM, E3200, 300mm, Epi Deposition System:
ASM, E3200 Reduced Pressure, 300mm, Epi Deposition System
Epsilon 3200, Epitaxial Reactor

In the fab.

• Gas Loops:
– Nitrogen (N2) purge
– Hydrogen (H2) carrier and purge
– Hydrogen chloride (HCl) wafer and chamber etch
– Primary silicon source, dichlorosilane (SiH2Cl2, gas)
– Low flow hydrogen chloride (HCl)
– Auxiliary silicon source, silane (SiH4)
– Germanium source, germane (GeH4)
• Advanced application valving (for multilayer sharp-transition processing)

195647

ASM  

Epsilon 3200 

List all items of this typeChemical Vapor Deposition Equipment - Other

in Chemical Vapor Deposition Equipment

1 Inquire F* Dresden, Saxony, Germany
ASM, E3200, 300mm, Epi Deposition System:

ASM, E3200 Reduced Pressure, 300mm, Epi Deposition System

Epsilon 3200, Epitaxial Reactor

In the fab.

• Gas Loops:
– Nitrogen (N2) purge
– Hydrogen (H2) carrier and purge
– Hydrogen chloride (HCl) wafer and chamber etch
– Primary silicon source, dichlorosilane (SiH2Cl2, gas)
– Low flow hydrogen chloride (HCl)
– Auxiliary silicon source, silane (SiH4)
– Germanium source, germane (GeH4)
• Advanced application valving (for multilayer sharp-transition processing)

194738

ASML  

XT-1400E 

List all items of this typeDeep UV Wafer Stepper

in Wafer Fabrication Equipment

1 Inquire F* Taichung, Taichung City, Taiwan
ASML Twinscan XT-1400F ArF, 193nm scanner, 300mm, :
ASML Twinscan XT-1400F ArF, 193nm scanner, 300mm, 

SN : M5215


194739

ASML  

XT-1400F 

List all items of this typeDeep UV Wafer Stepper

in Wafer Fabrication Equipment

1 Inquire Taichung, Taichung City, Taiwan
ASML Twinscan XT-1400F ArF, 193nm scanner, 300mm, :
ASML Twinscan XT-1400F ArF, 193nm scanner, 300mm, 

S/N : M5417
194740

ASML  

XT-1400F 

List all items of this typeDeep UV Wafer Stepper

in Wafer Fabrication Equipment

1 Inquire Taichung, Taichung City, Taiwan
ASML Twinscan XT-1400F ArF, 193nm scanner, 300mm, :
ASML Twinscan XT-1400F ArF, 193nm scanner, 300mm, 

S/N : M9794
195992

ASML  

PAS5500 /100D 

List all items of this typeDeep UV Wafer Stepper

in Wafer Fabrication Equipment

1 Inquire Singapore, Singapore
ASML PAS 5500 - /100D, iLine Stepper, 200mm:
ASML  PAS 5500 - /100D, 200mm, 
iLine Stepper
Bagged & Skidded in Warehouse

S/N: 6929

ASML 100 C/D ASTEP-23
PARAMETERSPECIFICATIONMEASURED
1.Illumination  
22.0X22.0 mm [%]<21.69
2.Intensity  
Itensity  [mw/cm2]>900968.73
3.Lens Distortion   
Red Blue
NCE [nm]
Magnification [ppm]
Reticle table tilt Rx[urad]
Reticle table tilt Ry[urad]
Reticle table Height [um]
0.0001<X<78
-3<x<3
-10<X<10
-10<X<10
-10<X<10
64.1
0.025
 2.108
3.305
-0.953
4.FOCAL  
image Tilt Rx[urad]-5<X<53.5
image Tilt Ry[urad]-5<X<5-0.9
Focus height  [um]-0.8<X<-0.6-0.664
6. Overlay  
Machine overlay to /100C or /100D
Reference machine [nm]
X<120
Y<120
Max: 68.4
Max: 70.8 
10.Who did the de-installation?  ASML
FPD[um]
AST[um]
0.40
0.35
0.407
0.189
195350

ASML  

AT-850D 

List all items of this typeOptical Inspection - Other

in Microscopes, Optical Inspection

1 Inquire F* Taichung, Taichung City, Taiwan
ASML AT-850D, 300mm, KrF 248nm Scanner:
ASML AT-850D, 300mm, KrF 248nm Scanner, 

S/N : M8929

Known Parts Missing:
qty. 1 CHUCK SWAP RAIL ATWT DOUBLE PIN

183169

ASM  

A412 

List all items of this typeVertical LPCVD Furnaces

in Chemical Vapor Deposition Equipment

1 Inquire F* Malta, NY, United States
ASM A412 Vertical Furnace, 300mm, LPCVD SiN & SiN:
ASM A412 Vertical Furnace, 300mm, LPCVD SiN & SiN
Twin LPCVD SiN Reactors

TOOL ID: FVX2541

2011 Vintage
183170

ASM  

A412 

List all items of this typeVertical LPCVD Furnaces

in Chemical Vapor Deposition Equipment

1 Inquire F* Malta, New York, United States
ASM A412 Vertical Furnace, 300mm, LPCVD SiN & SiN:
ASM A412 Vertical Furnace, 300mm, LPCVD SiN & SiN
Twin LPCVD SiN Reactors

TOOL ID: FVX2540

2011 Vintage

 

Tool ID: FVX2541

 
183417

ASM  

A412 Dual Reactor  

List all items of this typeVertical LPCVD Furnaces

in Chemical Vapor Deposition Equipment

1 Inquire F* Malta, New York, United States
ASM A412 Vertical Furnace, 300mm, LPCVD As Dpoed Poly / TiN:
ASM A412 Vertical Furnace, 300mm, LPCVD As Dpoed Poly / TiN
Twin LPCVD As Doped Reactors

TOOL ID: FVX2560

Chemistry TiCl4, NH3, NF3, Cl2, SiH4, AsH4

2011 Vintage

 

Tool ID: FVX2560

183418

ASM  

A412 Dual Reactor  

List all items of this typeVertical LPCVD Furnaces

in Chemical Vapor Deposition Equipment

1 Inquire F* Malta, New York, United States
ASM A412 Vertical Furnace, 300mm, LPCVD As Doped Poly / TiN:
ASM A412 Vertical Furnace, 300mm, LPCVD As Doped Poly / TiN
Twin LPCVD As Doped Reactors

TOOL ID: FVX2561

Chemistry TiCl4, NH3, NF3, Cl2, SiH4, AsH4

2011 Vintage

 

Tool ID: FVX2561

NOTE:
   photo available
   reference document attached
  F* if the item is specially featured
  N* if the item is newly added, and/or
  R* if the item's price is recently reduced.