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FULL DESCRIPTION of Item 178357

in Other Plasma Processing Equipment and Tools
Item ID: 178357

Offered1 Offered Inquire


Applied Materials, Etch, Centura Carina Chamber 300mm

Tool ID : ETX2291-c

Chamber Only.
Carina Etch Chamber.
 Chamber Materials: ADVANCED CERAMIC
Lid Materials:  AG 1000
Process Ring: QUARTZ SINGLE RING
Plasma Exposed Chamber Oring: KALREZ
Cathode Temperature Range: 130 TO 250C
Carina Etch Swap Kit: 1
Chamber Viewport: STANDARD VIEWPORT
Endpoint Type: EyeD IEP
CCM Cover: NO



Location is Malta, NY.

Tool ID: ETX2291-c

Applied Materials, Etch, Centura Carina Chamber 300mm

Location: Malta, NY, United States
Unit Price Inquire
Number of Units 1
Manufacturer AMAT
Model Centura
Other Information 
         

Gas Panel Pallet C

       

  Gas Line Requirement

Selected Option

Part# or NSR#

Part or NSR Description

Note #

     Pallet Configuration

7-Jul

 

 

 

     Flow Ratio Controller

FRC

 

 

 

     DPS Overpressure Kit

NO

Part of TEMPNSR-02

DPS overpressure kit - YES

 

         

  Gas Line Configuration

Selected Option

Part# or NSR#

Part or NSR Description

Note #

     Gas Type 1

HEATED BCL3

 

 

 

     MFC 1 Size

400 SCCM

 

 

 

     Gas Type 2

CL2

 

 

 

     MFC 2 Size

200 SCCM

 

 

 

     Gas Type 3

CL2

 

 

 

     MFC 3 Size

30 SCCM

 

 

 

     Gas Type 4

HBR

 

 

 

     MFC 4 Size

400 SCCM

 

 

 

     Gas Type 5

HEATED SICL4

 

 

 

     MFC 5 Size

200 SCCM

Part of TEMPNSR-02

Heated SiCL4 @ 100

 

     Gas Type 6

NF3

 

 

 

     MFC 6 Size

200 SCCM

 

 

 

     Gas Type 7

CHF3

 

 

 

     MFC 7 Size

400 SCCM

 

 

 

     Gas Type 8

O2

 

 

 

     MFC 8 Size

200 SCCM

 

 

 

     Gas Type 9

HEO2 (70/30)

 

 

 

     MFC 9 Size

50 SCCM

 

 

 

     Gas Type 10

N2

 

 

 

     MFC 10 Size

100 SCCM

 

 

 

     Gas Type 11

AR

 

 

 

     MFC 11 Size

300 SCCM

 

 

 

     Gas Type 12

CF4

 

 

 

     MFC 12 Size

300 SCCM

 

 

 

     Gas Type 13

SF6

 

 

 

     MFC 13 Size

100 SCCM

 

 

 

     Gas Type 14

HE

 

 

 

     MFC 14 Size

400 SCCM

 

 

 

Extended Description  Details at 1439572754_ETX2291 Upgrade -- Removed Carina chamber pictures (1).jpg
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