Manufacturer Model Wafer Size Range Minimum Wafer Size Range Maximum Wafer Size Range Set Size Cassette to Cassette Number of Cassette Elevators Wafer Handling Accuracy Vacuum Chuck Diameter Vacuum Chuck Plating Material Temperature Controlled Chuck
| Automatic Alignment OCR Camera Probe Mark Inspection Software Revision Level Interface Refurbished Accessories Other Information Extended Description Year of Manufacture Condition Power Requirements Voltage
| Power Requirements Amps Power Requirements Frequency Power Requirements Phase CE Marked External Cooling Operating Air Pressure Air Consumption Vacuum Required Exterior Dimensions Width Exterior Dimensions Depth Exterior Dimensions Height Weight
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