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Manufacturer Model Wafer Size Range Minimum Wafer Size Range Maximum Wafer Size Range Set Size Process Capabilities Number of Cassette Platforms Robot Manufacturer/Model Controller Manufacturer/Model Software Revision Level Interface Maximum Temperature Minimum Temperature Number of Control Zones	Flat Zone Length Overtemperature Protection Process Gases Vacuum Pump Manufacturer/Model Cassette to Cassette External Cooling Accessories Other Information Extended Description Power Requirements Voltage Power Requirements Amps Power Requirements Amps 2 Power Requirements Frequency Power Requirements Phase	Operating Air Pressure Air Consumption Cooling Water Reqd Minimum Flow Cooling Water Reqd Minimum Temperature Cooling Water Reqd Maximum Temperature Vacuum Required CE Marked Year of Manufacture Refurbished Condition Exterior Dimensions Width Exterior Dimensions Depth Exterior Dimensions Height Weight