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FULL DESCRIPTION of Item 207927

in Interferometers
Item ID: 207927

Offered 1 Offered Inquire


Nanometrics, ATLAS, Photomask, Scatterometry, 1000-00910

Nanometrics, ATLAS, Photomask, Scatterometry, 1000-00910 

DOM : 2006

S/N : L-ATLAS-0606-0078

DUV-Visible spectroscopic reflectometer
featuring Nanometrics' patented absolute
reflectance technology. Wavelength range:
190nm to 780nm

Asyst Versaport in BOLTS type configuration
for Masks Included. 

SMALL SPOT OPTION INCLUDED:

UV to NIR Small Spot Spectroscopic
Ellipsometer Includes:

• UV to NIR Small Spot Spectroscopic
ellipsometer with wavelength range of 210nm
to 1,000nm
• SE UV Filter blocks light below 520nm
from Xenon light path
• Thermal control on individual
ellipsometer parts provides excellent
reproducibility and stability
• Coincident ellipsometer and
Reflectometer Spots
• Simultaneous ellipsometer and
reflectometer data collection
• Comprehensive suite of measurement
algorithms (dispersion models) including
Cauchy, Lorentz oscillators, interpolation,
EMA, tabular data and expansion capability
• SE measurement pad size: 50μ x 50μ

Tool ID: BTV140074858000

Nanometrics, ATLAS, Photomask, Scatterometry, 1000-00910

Location: Burlington, Vermont, United States
Unit Price Inquire
Number of Units 1
Manufacturer Nanometrics
Model ATLAS - 1000-00910
Description Wafer Mask Metrology
Extended Description  Details at BTV140074858000.pdf
Year of Manufacture 2006

Shipping & Handling:

All freight cost estimates are for dock to dock service only.
Any additional services, i.e. lift-gate, inside or residential delivery, must be requested at the time of sale and will be billed accordingly.
GLOBALFOUNDRIES is not responsible for any damage incurred during shipment. It is the buyer's responsibility to inspect packages for damage and to note any damage on bill of lading.
 
Payment:

All other sales, including foreign sales, are prepayment only.
MasterCard, VISA, Discover and AMEX are accepted at sellers discretion.