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in Other Wafer Production Equipment
Item ID: 192338

Offered 1 Offered Inquire

Canon Anelva, C-7100GT, 300mm PVD, Gate Metal Deposition System

Canon Anelva, C-7100GT, 300mm PVD, Gate Metal Deposition System

S/N : EVP-52041

DOM : 2007

This is a PVD (Physical Vapor Deposition) system for high-quality metal or metal compound
deposition with greater efficiency, reliability and lower cost of ownership. This system is
comprised of two [2] 2PVD-EX modules, three [3] PCM-X modules, one
[1] Degas module, one [1] 4/5PVD-EX module, two [2] wafer transfer modules with one [1] Pass
module with one [1] aligner, two [2] loadlock modules and EFEM with one [1] aligner and two [2] load ports.
This system processes 300mm SEMI notch wafer.

Tool ID: MDX400

Canon Anelva, C-7100GT, 300mm PVD, Gate Metal Deposition System
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Location: Dresden, Saxony, Germany
Unit Price Inquire
Number of Units 1
Manufacturer Canon Anelva
Model C-7100GT
Description PVD Metal Gate Deposition System, Tandem Core
Extended Description  Details at MDX400 Configuration.pdf

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