Operator:ASML          Machine:4210         Release:5.1.0         Date:04/01/2024         Time:15:07

  Report Filename : EMZC.03
  Report Path     : TM/MetrologyCalibration/InitXYplane/EMZC.log/
  Machine Type    : XT1900GI

  Testname                : Ilias Lens Set-up
  Start Time              : Thu, 04 Jan 2024 14:13:27 363217us +0800
  Stop Time               : Thu, 04 Jan 2024 15:01:13 176195us +0800
  Execution Time          : 00:47:45
  Test Run Result         : Finished
  Test Status             : Test is Finished
  Machine Constants       : Not Saved
  Results Validation      : N.A.
  Measurement Quality     : N.A.
  Comment                 : 04JAN2024_DPM



  +----------------------+------------+-----------+----------+----------------+
  |         Step         | Start Time | Stop Time |  Status  | Execution Time |
  +======================+============+===========+==========+================+
  | Initialize Data      | 14:13:27   | 14:13:28  | Finished | 00:00:01       |
  | Prepare Machine      | 14:13:28   | 14:16:27  | Finished | 00:02:59       |
  | Perform Measurements | 14:16:27   | 15:00:59  | Finished | 00:44:31       |
  | Model                | 15:00:59   | 15:01:13  | Finished | 00:00:14       |
  +----------------------+------------+-----------+----------+----------------+

Scenario Inputs

  Selected Scenario        : Manual
  Verification Set         : No Verification
  Overrule Inputs          : Yes
  Manual Scenario Selected : Yes







  Test Info
    Machine ID                   : 4210
    Machine type                 : XT1900GI
    Lens ID                      : 0140140z
    ELLE ID                      : 000000
    Testlog                      : ZSCA_4210_20240104_1416_manual.tlg
    Date and time of measurement : 01/04/2024 14:16
    Reticle ID                   : 45565276P195
    Measurements layout          : UVXY-UV13X2
    Clearout reticle             : No
    Chuck ID                     : Chuck 2
    Pupil Shape
      Illumination mode          : Annular
      NA                         :    1.350
      DOE ID                     :   15
      Sigma
        inner                    :    0.550
        outer                    :    0.930
      PCE ID                     :    1
      PSE ID                     :    0
    Number of cycles             :    1
    Number of Y positions        :    5
    Lens Temperature             :   22.00  [C]
    Lens Pressure                : 1011.36  [mbar]
  Lens Stability

    Zernike delta over measurement time
      +------+--------+-------+----------+
      |      | Delta  | Spec. | In Spec. |
      |      |  [nm]  | [nm]  |          |
      +======+========+=======+==========+
      | Z5   | -0.412 | 2.000 | Yes      |
      | Z7   |  0.400 | 2.000 | Yes      |
      | Z9   |  0.396 | 2.000 | Yes      |
      | Z14  |  0.046 | 2.000 | Yes      |
      | Z16  |  0.136 | 2.000 | Yes      |
      +------+--------+-------+----------+

  RMS values
    +-------------+---------+------------------+---------------------+
    |             |         | After Correction |       Deltas        |
    |             |         +---------+--------+------+-------+------+
    |             | Current |  NEXZ   |  +SA   | NEXZ |  SA   | Both |
    |             |  [nm]   |  [nm]   |  [nm]  | [nm] | [nm]  | [nm] |
    +=============+=========+=========+========+======+=======+======+
    | Spherical   |    0.59 |    0.53 |   0.56 | 0.06 | -0.03 | 0.03 |
    | Coma        |    0.50 |    0.34 |   0.32 | 0.15 |  0.02 | 0.17 |
    | Astigmatism |    0.34 |    0.25 |   0.25 | 0.09 | -0.00 | 0.09 |
    | 3-foil      |    0.38 |    0.38 |   0.37 | 0.00 |  0.01 | 0.01 |
    | (Z5->Z37)   |    1.27 |    1.07 |   0.98 | 0.20 |  0.09 | 0.29 |
    | (Z38->)     |    0.92 |    0.92 |   0.92 | 0.00 |  0.00 | 0.00 |
    +-------------+---------+---------+--------+------+-------+------+

  Std Values
    +-------------+---------+------------------+----------------------+
    |             |         | After Correction |        Deltas        |
    |             |         +---------+--------+-------+------+-------+
    |             | Current |  NEXZ   |  +SA   | NEXZ  |  SA  | Both  |
    |             |  [nm]   |  [nm]   |  [nm]  | [nm]  | [nm] | [nm]  |
    +=============+=========+=========+========+=======+======+=======+
    | Std Z2->Z3  |    3.03 |    2.54 |   2.45 |  0.49 | 0.10 |  0.58 |
    | Std Z5->Z37 |    1.44 |    1.59 |   1.59 | -0.15 | 0.00 | -0.15 |
    +-------------+---------+---------+--------+-------+------+-------+