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in Other Microscope Inspection Items
Item ID: 189211

Offered1 Offered Inquire

HMI, eScan 320, 300mm, ebeam Inspection

HMI, eScan 320, 300mm, ebeam Inspection
eScan 320 eBeam defect inspection and review system
Integrated front-end, Dual Pod 300mm FOUP 
2- High quality flat panel displays
GUI/Image computer XEON Dual CPU 3.2GHZ, 2GB Memory
Host computer Pentium IV 3.2 GHZ, 2GB Memory
DBDB (Detection, baseon Design Base) function
E-chuck wafer holder
Active Damping
TFE electron beam emission source sub-system
Electron=optice column sub-system
HV power sub-system
Programmable wafer biasing & charge balance control.
SE and BSE high speed detection 

Tool is still in the fab.

Tool ID: SEI2700

HMI, eScan 320, 300mm, ebeam Inspection
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Location: Malta, New York, United States
Unit Price Inquire
Number of Units 1
Manufacturer Hermes Microvision
Model eScan 320
Description e-beam defect inspection and review system
Year of Manufacture 2012
Condition Very Good

Shipping & Handling:

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Any additional services, i.e. lift-gate, inside or residential delivery, must be requested at the time of sale and will be billed accordingly.
GLOBALFOUNDRIES is not responsible for any damage incurred during shipment. It is the buyer's responsibility to inspect packages for damage and to note any damage on bill of lading.

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