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FULL DESCRIPTION of Item 183418

in Vertical LPCVD Furnaces
Item ID: 183418

Offered1 Offered Inquire


ASM A412 Vertical Furnace, 300mm, LPCVD As Doped Poly / TiN

ASM A412 Vertical Furnace, 300mm, LPCVD As Doped Poly / TiN
Twin LPCVD As Doped Reactors

TOOL ID: FVX2561

Chemistry TiCl4, NH3, NF3, Cl2, SiH4, AsH4

2011 Vintage

 

Tool ID: FVX2561

Tool ID: FVX2561

ASM A412 Vertical Furnace, 300mm, LPCVD As Doped Poly / TiN
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Location: Malta, New York, United States
Unit Price Inquire
Number of Units 1
Manufacturer ASM
Model A412 Dual Reactor
Wafer Size Range 
  Set Size 300 mm

Shipping & Handling:

All freight cost estimates are for dock to dock service only.
Any additional services, i.e. lift-gate, inside or residential delivery, must be requested at the time of sale and will be billed accordingly.
GLOBALFOUNDRIES is not responsible for any damage incurred during shipment. It is the buyer's responsibility to inspect packages for damage and to note any damage on bill of lading.
 
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