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FULL DESCRIPTION of Item 180506

in Vertical LPCVD Furnaces
Item ID: 180506

Offered1 Offered Inquire


Kokusai Quixace Ultimate, 300mm, MT-TiN, DJ-1236VN-DF

Kokusai Quixace Ultimate, 300mm, MT-TiN, DJ-1236VN-DF
TiCl4, NH3 - Process for TiN - Prior Use

Cartridge Heater - D4EX22250, RHC2 Heater
Number of control zone, 5 zones
Heater element material - KANTHAL APM
Maximum heating temperature range - 1050 degC (in Furnace)
Flat zone length - 800mm (±2.0 degC at 800 degC)
Main Controller(OU) - D4EX38403(KDSC-2007CONT), Made by HKDE
Core2Duo 2.16GHz, 2.0GB, 80GB (RAID1), 100BASE-TX 3Ch, USB2.0
Main Operation Unit - TM150-HKT05 
Sub Operation Unit - D4EX40577
Bottle Heater (For Ta Source) - E-0456-17, Tokyo Gikken
Bottle Heater (For Ta Source) - E-0456-17, Made by Tokyo Gikken
Bubbling UNIT (For Ti Source) - D4EX31240, Made by Schumacher
Bottle (For Ti Source) - BK1200URK, Made by Schumacher
N2 Purge Load Lock System
O2 Monitor / Detector - SH-305(RX-501052), Made by ENEGY SUPPORT
FOUP Opener N2 Purge SYSTEM - Made by HITACHI KOKUSAI

S/N: T2DC6-15901

Tool ID: FVX4470

Kokusai Quixace Ultimate, 300mm, MT-TiN, DJ-1236VN-DF

Location: Dresden, SN, Germany
Unit Price Inquire
Number of Units 1
Manufacturer Kokusai
Model DJ-1236VN-DF
Wafer Size Range 
  Set Size 300 mm
Process Capabilities LPCVD TiN
Extended Description  Details at FVX4470 Plumbing Schematic.pdf
CE Marked YES
Year of Manufacture 2013
Condition Like New

Shipping & Handling:

All freight cost estimates are for dock to dock service only.
Any additional services, i.e. lift-gate, inside or residential delivery, must be requested at the time of sale and will be billed accordingly.
GLOBALFOUNDRIES is not responsible for any damage incurred during shipment. It is the buyer's responsibility to inspect packages for damage and to note any damage on bill of lading.
 
Payment:

All other sales, including foreign sales, are prepayment only.
MasterCard, VISA, Discover and AMEX are accepted at sellers discretion.