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in Other Optical Inspection
Item ID: 196827

Offered1 Offered Inquire

ASML AT-850, 300mm, KrF 248nm Scanner


ASML AT-850D, 300mm, KrF 248nm Scanner, 

S/N : m5946

Known Tool Issues:
Currently power off with Lens gas flowing, tool had issue with illumination rack that will require replacement.  The tool currently has all of the parts present, but they have not necessarily been calibrated or setup with the tool being off.  Laser has 104.5 Billion pulses on it.  Components were good when shutdown.
The Beam steering hardware in not functional, and the ACC needs an heat exchanger installed


Tool ID: GB03

Tool ID: GB03

ASML AT-850, 300mm, KrF 248nm Scanner
  Click to see additional image(s)... other images

Location: East Fishkill, New York, United States
Unit Price Inquire
Number of Units 1
Manufacturer ASML
Model AT 850
Description 300mm, KrF 248nm Scanner
Extended Description  Details at LASER PULSE COUNTS ON GB03.pdf
click to view document at right in new windowLens Performance

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